What is a vertical Tube furnace & How to choose

High-quality insulation materials made of vacuum-formed fiber plates enable energy-saving operation and a fast-heating time due to low heat storage and heat conductivity. By using different gas supply systems, operations can be perforlmed under non-flammable or flammable protective or reactive gases or under vacuum.

What is a vertical Tube furnace?

Vertical Tube furnaces are used for processing wafers during semiconductor device manufacturing—including for film formation, annealing, and resin film hardening. These batch processing furnaces feature a vertically arranged quartz tube that heats objects placed around the tube for processing. Wafers are loaded onto quartz storage shelves called boats, which are loaded/unloaded from the bottom of the process tubes. With minimal particle generation, the furnaces provide excellent temperature distribution and atmosphere control. In addition, automatic wafer and boat transfer makes it possible to further improve productivity.

Why choose a Vertical Tube Furnace instead of a Horizontal Tube Furnace ?

Horizontal Tube furnaces are prone to non-uniform film thicknesses within a batch and on wafer surfaces as well as particle and natural oxide film generation, and the equipment itself requires more area due to the increased wafer diameters. Vertical furnaces, however, are not limited by such problems, which factors into their mainstream popularity.

What is application ranges for a vertical Tube furnace?

Vertical tube furnace is a heating device mainly used for gas quenching tests under vacuum or atmospheric conditions. Heat treatment applications including syntheses and purifications, oxidation, diffusion, calcination, thermal annealing of inorganic or organic compounds in labs and industrial.

How to Choose Vertical Tube Furnaces?

Different types of tube furnaces have their own advantages. Choosing a right tube furnace is important to your heat treatments performance. 

* Working temperature range firstly: namely 30-1100°C, 1200-1300°C, 1400-1700°C. By this mean, it is important to know the actual working temperature of the loaded materials. In addition, price and furnace structures differ much among temperature ranges.

* Heating zone: single zone, 2 zone, multi-zone tube furnace, a suitable working space will improve the heating performance and cost less

* Heat treatment processes affect the furnace configurations. For example, for quenching test, a vertical tube furnace is better.

* Furnace chamber working conditions: sometimes, the processed conditions affect the furnace structure much. For example, kind of atmospheres, vacuum level etc.

About Across International Newly designed Furnace :

Across International newly designed Vertical Tube furnace with the release of a horizontal heat treatment system manufactured under the Mitsubishi .

VTF1200 50x600mm (ODxlength) portable vertical tube furnaces feature spiral wire coils embedded in Mitsubishi (Japan) alumina fiber insulation. A double walled steel internal housing helps minimize heat loss to the exterior surface. Furnace operation is controlled by a 30-segment digital controller. All our furnaces are CE compliant.

Across International has since provided a wide range of heat treatment technologies that have played a role in the growth and development of the semiconductor industry Our focus on the niche markets we excel in and makes every effort to develop the new technologies and equipment those markets demand.

If any Tube furnace are interested in the above for your research or Laboratory, please speak with our Tech specialist. Across International ability to propose various equipment—from small-volume production equipment for research and development and for state-of-the-art devices, to full-scale production equipment—can be utilized to provide satisfactory results that meet customer requirements.