1200C Vertical Fluidized Bed CVD Tube Furnace (Call for Price)

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The AI-FBTF-1200 is a vertical fluidized bed tube furnace engineered for CVD powder surface deposition, powder coating, and particle encapsulation experiments up to 1200°C. The furnace tube features a high-purity quartz tube with an integrated porous quartz diffuser plate (pore size ~10 μm). Process gas is introduced from the bottom and passes uniformly through the diffuser, suspending powder particles in the heated zone for uniform coating or CVD treatment. The open-style furnace body allows easy tube removal after experiments; the quick-release flange collar provides direct access to processed powder.

 

 

Overview

Designed for powder surface deposition and coating experiments, the furnace combines a vertical tube configuration with a true fluidized-bed reaction zone. Powder samples are supported on a welded porous quartz plate while process gas introduced from below fluidizes the particles within the center section of the tube, where a recirculating flow keeps them fluidized in the uniform heated region.

The furnace design provides easy access for loading and unloading. After processing, the furnace body opens easily, allowing the quartz tube to be removed and the compression-type flange assembly to be released for convenient powder recovery and cleaning. The heating chamber is constructed from vacuum-formed, high-purity polycrystalline alumina fiber insulation and incorporates four-side heating elements to ensure exceptional temperature uniformity. A programmable 30-segment PID controller provides precise management of heating ramps, dwell periods, and cooling profiles, while integrated over-temperature protection and safety interlocks enhance operational reliability and user safety.

Typical applications: CVD coating of powders and particulate materials, atomic-layer deposition, and thin-film precursor studies, catalyst synthesis, advanced materials processing, and gas solid reaction research in universities, national laboratories, and industrial laboratories.

 

Key Features

•    True fluidized-bed design — porous quartz distributor plate suspends powder for uniform gas–solid contact.

•    30-segment programmable PID control with self-tuning for precise multi-step thermal profiles.

•    Layered safety: Over-temperature and broken-thermocouple protection automatically cut the circuit breakerand ground-fault protection guard against overcurrent and leakage.

•    High-purity alumina polycrystalline-fiber chamber with 4-side heating and a thermally simulated, balanced temperature field.

•    Imported Kanthal® A-1 (Sweden) elements (Optional) rated to high surface temperatures for extended life.

•    RS-485 interface with PC software (Optional) for real-time PV/SV monitoring, live ramp-curve plotting, and data logging.

•    Power-loss recovery resumes heating from the current furnace temperature rather than restarting the program.

•    Openable furnace body and clamp-type quartz flange for fast sample loading and powder recovery.

•    Low external surface temperature (≤ 45 °C) for safer benchtop operation.

•    UL-certified electrical package (Optional), TUV and CE certifications available.

 

 

Options & Accessories

•    Gas supply: Mass-flow-controller or rotameter (float) gas delivery systems

•    Vacuum pumps: Single-stage (TW-1.5A), two-stage rotary (2XZ-2, to ~10 Pa), VS-0.1 system (to 0.1 Pa)

•    High-vacuum package: Turbomolecular + backing pump (to ~1×10⁻³ Pa); Pfeiffer (Germany) molecular pump

•    Constant-pressure pump (−100 to +100 kPa control)

•    INFICON (UK) capacitance manometer, PCG550 (3.8×10⁻⁵–1125 Torr); corrosion-resistant PCG554 option

•    Resistance and compound vacuum gauges

•    Flange options: Hinged flange, water-cooled flange, gauge/KF25-bellows port flange

•    Vacuum fittings: KF25/KF40 bellows, baffle valves, clamps, and tees

 

Operating Precautions

1.  The maximum allowable internal pressure of the quartz tube is 0.02 MPa. Do not exceed this limit under any operating conditions.

2.  Always install a pressure-reducing regulator on the gas cylinder and maintain the gas supply pressure below 0.02 MPa.

3.  Keep the process gas flow rate below 200 SCCM to prevent thermal shock and potential damage to the heated quartz tube.

4.  Do not close both the inlet and outlet valves while the furnace is operating. If valve closure is necessary, continuously monitor the pressure gauge and immediately open the exhaust valve if the pressure approaches or exceeds 0.02 MPa.

5. Adjust the gas flow rate according to the powder particle size. Excessive gas velocity may sweep away particles and carry them out of the heated reaction zone, reducing process efficiency and sample recovery.

 

• Tube internal pressure must not exceed 0.02 MPa at any time

• A pressure regulator must be installed on all gas supply cylinders; keep inlet pressure below 0.02 MPa

• Gas flow entering the tube must remain below 200 SCCM to avoid thermal shock to the heated tube

• Do not close both inlet and outlet valves simultaneously during heating — monitor pressure gauge continuously

• If pressure exceeds 0.02 MPa, open exhaust valve immediately to prevent tube rupture or flange ejection

 

One-year limited warranty with lifetime technical support. Consumables (heating elements, quartz tube, crucibles) and damage resulting from corrosive or acidic gas exposure are excluded from warranty coverage.