Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
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