Ultrasonic Nano Spray (UNS) module combines the MSK-USP-G—LD 1.7MHz ultrasonic automizer (liquid evaporator), and a digital TYD Series laboratory syringe pump into a single system. This combined unit is designed to integrate with most tube furnaces and CVD systems. This ultrasonic nano spray generates a fine, uniform, aerosol from liquid precursors and delivers it to CVD system at controlled flow rates. This enables consistent nano material synthesis and highly uniform thin film deposition.
Ultrasonic Nano Spray (UNS) module combines the MSK-USP-G—LD 1.7MHz ultrasonic automizer (liquid evaporator), and a digital TYD Series laboratory syringe pump into a single system. This combined unit is designed to integrate with most tube furnaces and CVD systems. This ultrasonic nano spray generates a fine, uniform, aerosol from liquid precursors and delivers it to CVD system at controlled flow rates. This enables consistent nano material synthesis and highly uniform thin film deposition.
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